Title of Project : Fabrication and Characterization of Electrical Field – induced Resistive Sensor at the end of Scanning Probe Tip

Scanning resistive probe microscopy (SRPM) , a variant of SPM-based techniques, which has a semiconducting resistor at the apex of the tip and can directly observe surface charges, was newly proposed and fabricated. Working principle of detecting surface charge is that resistance changes by field-induced in a small resistive region at the apex of the tip was measured. In order that SRPM technique is a more compatible tool as read/write head of a probe data storage system, higher spatial resolution and sensitivity are needed. A small resistive region at the apex of the tip determines the spatial resolution and sensitivity. Therefore, the measurement of two-dimensional doping profiles in resistive region is of critical importance. For the measurement of two-dimensional doping profiles, KPFM and SNDM are used.